Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
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United States of America Patent
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May 17, 2005
Issued Date -
N/A
app pub date -
May 6, 2003
filing date -
May 19, 2000
priority date (Note) -
Expired
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Abstract
A method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film on a substrate. A rotating compensator ellipsometer is used which generates both 2ω and 4ω output signals. The 4ω omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the thin film based on the 2ω signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyze a sample whose temperature is unknown.
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