Temperature compensation mechanism for a micromechanical ring resonator
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United States of America Patent
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May 17, 2005
Grant Date -
Jan 8, 2004
app pub date -
Aug 29, 2003
filing date -
Nov 2, 1999
priority date (Note) -
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Abstract
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator includes a free-standing oscillating structure having a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.
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