Manipulator for an optical or particle-optical apparatus
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United States of America Patent
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May 17, 2005
Grant Date -
May 20, 2004
app pub date -
Mar 24, 2003
filing date -
Mar 22, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention is directed to a manipulator for an optical apparatus including a particle-optical apparatus. The manipulator is especially a diaphragm or specimen manipulator in an electron microscope. The component (4), which is to manipulated, is accommodated by a transfer body (2) movable relative to a spatially-fixed component (1) and the transfer body (2) includes a composite material having a high thermal conductivity while simultaneously having a vanishing or negative thermal expansion coefficient in the direction of the connecting axis (B—B) between the component (4) and the spatially-fixed component (1).
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