Polishing apparatus with abrasive tape, polishing method using abrasive tape and manufacturing method for magnetic disk
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United States of America Patent
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May 17, 2005
Grant Date -
Oct 7, 2004
app pub date -
Sep 5, 2003
filing date -
Mar 17, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An abrasive tape is supplied to a tape head by a tape supply unit and taken up from the tape head by a tape take-up unit. The tape head presses the abrasive tape against a surface of an object under polish, which is rotated by a rotating unit. A tape head pressuring unit utilizes a voice coil motor, for example. Since the tape head pressuring unit generates a pressuring force for pressuring the tape head using the electromagnetic force, it is able to set a minute pressuring force by controlling a drive signal, and to obtain the fine adjustment of the pressuring force easily by controlling the electric signal. Therefore, it becomes possible to press the abrasive tape against the surface of the object under polish with a desired low pressure.
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