Substrate delivering robot
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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May 17, 2005
Grant Date -
N/A
app pub date -
Sep 17, 2001
filing date -
Dec 15, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm linked with the fixed base, a second turnable arm linked with the first arm, and a turnable fork linked with the second arm, wherein the fork comprises a plurality of first and second independent forks. The first and second forks are fixed coaxially and vertically in two stages to the forward end part of the second arm such that they can turn independently and first and second fork drive motors are disposed in the second arm.
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