Measurement box with module for measuring wafer characteristics
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 10, 2005
Grant Date -
Oct 16, 2003
app pub date -
Apr 11, 2002
filing date -
Apr 11, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A measurement box which can be integrated into existing wafer processing equipment. The measurement box comprises an enclosure which contains a measurement module for measuring objects such as the surfaces of wafers. The measurement module is equipped with a miniaturized measuring device and has a displaceable measuring head and a plane table with a rotatable wafer holder. The enclosure has at least one loading opening for the wafer to pass through as well as a ventilation device.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully