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Abstract

The invention relates to an ion beam scanning system having an ion source device, an ion acceleration system and an ion beam guidance system comprising an ion beam outlet window for a converging centered ion beam, and a mechanical alignment system for the target volume to be scanned. For that purpose, the ion acceleration system can be set to an acceleration of the ions required to obtain a maximum depth of penetration. The scanning system also has energy absorption means arranged in the path of the ion beam between the target volume and the ion beam outlet window transverse to the center of the ion beam. The energy absorption means can be displaced transverse to the center of the ion beam in order to vary the energy of the ion beam, so enabling, in the target volume, depth modulation of the ion beam, which is effected by means of a linear motor and the transverse displacement of the energy absorption means, with depth-staggered scanning of volume elements of the target volume in rapid succession. The invention relates also to a method of ion beam scanning and a method of operating an ion beam scanning system using a gantry system.

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First Claim