Measurement of complexing agent concentration in an electroless plating bath

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United States of America Patent

PATENT NO 6890758
APP PUB NO 20040253740A1
SERIAL NO

10461652

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Abstract

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The concentration of citrate complexing agent in an electroless cobalt or nickel plating bath is determined by titrating a sample of the electroless plating bath containing a small concentration of free fluoride ion with a standard lanthanum nitrate solution. During the titration, La3+ ion first reacts preferentially with the citrate complexing agent and then with fluoride ion, which reduces the free fluoride ion concentration. The endpoint for the titration is indicated by a substantial decrease in the free fluoride ion concentration, which is detected via a fluoride ion specific electrode (ISE). The method can be used for analysis of other complexing agents.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bratin, Peter Flushing, NY 19 230
Kogan, Alex Carlstadt, NJ 70 356
Pavlov, Michael Fairlawn, NJ 16 160
Perpich, Michael James Hackensack, NJ 7 99
Shalyt, Eugene Washington Township, NJ 28 175

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