Planar mechanical resonator sensitive along an axis perpendicular to its plane
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United States of America Patent
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May 10, 2005
Grant Date -
Jun 17, 2004
app pub date -
Jan 29, 2002
filing date -
Feb 23, 2001
priority date (Note) -
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Abstract
The invention concerns a mechanical resonator with a planar monolithic vibrating structure extending along a closed contour whereof the axis of sensitivity is substantially perpendicular to the plane of said structure. The invention is characterised in that the planar structure (1) is a regular convex polygon with 4k vertices (3) (k being the order of the vibrational mode implemented when the resonator is vibrated) and is suspended to a fixed base (4, 5) via n suspension arms (2) with substantially radial extension arranged substantially symmetrically.
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