Apparatus for producing thin-film electrolyte
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United States of America Patent
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May 3, 2005
Grant Date -
Jan 27, 2005
app pub date -
Jul 11, 2003
filing date -
Jul 11, 2003
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Abstract
An apparatus for producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The apparatus has a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).
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