Device for supporting thin semiconductor wafers
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United States of America Patent
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Apr 26, 2005
Grant Date -
Aug 12, 2004
app pub date -
Feb 11, 2003
filing date -
Feb 11, 2003
priority date (Note) -
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Abstract
A device for supporting and securing thin wafers comprising a housing having an upper shelf extending radially inwardly from the housing and a lower shelf extending radially inwardly from the upper shelf. An upper seal is disposed within the upper shelf and an inspection windowpane is disposed within the lower shelf. A vacuum is provided between the inspection windowpane and the upper seal to secure the wafer to the inspection windowpane and to secure the inspection windowpane to the housing. A ring-shaped frame assembly may further support and secure the wafer.
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