Wafer container
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United States of America Patent
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Apr 26, 2005
Grant Date -
Mar 25, 2004
app pub date -
Sep 24, 2003
filing date -
Jun 30, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.
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