Semiconductor manufacturing facility and a semiconductor manufacturing method
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United States of America Patent
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Apr 26, 2005
Grant Date -
Oct 24, 2002
app pub date -
Mar 22, 2002
filing date -
Mar 23, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor manufacturing facility has a proper strength and an anti-vibration effect. The semiconductor facility contains processing apparatuses, installation tables and an installation floor. An apparatus having a vibration source is installed on an installation table having a rigid structure. The installation table is installed on the installation floor having a floor construction including a plurality of columns, which support a floor member extending in horizontal directions. An interval of the columns is 4 m to 12 m.
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