Applications operating with beams of charged particles

United States of America Patent

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Apr 12, 2005
Grant Date
Mar 25, 2004
app pub date
Jul 16, 2003
filing date
Jul 18, 2002

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Expired

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Abstract

A particle-optical apparatus is proposed which comprises a particle-optical lens for deflecting a plurality of separate beam-charged particles which is provided by a plurality of finger electrodes provided along an opening of the lens.

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Patent Owner	Address
CARL ZEISS NTS GMBH	73447 OBERKOCHEN

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Inventor Name	Address	# of filed Patents	Total Citations
Kienzle, Oliver	Aalen, DE	19	362
Knippelmeyer, Rainer	Aalen, DE	40	852

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Applications operating with beams of charged particles

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10619690

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PATENT NO	6878936
APP PUB NO	20040056193A1
SERIAL NO	10619690
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 12, 2005	US,6878936,B2 US6878936B2	GRANTED PATENT AS SECOND PUBLICATION
March 25, 2004	US,20040056193,A1 US20040056193A1	FIRST PUBLISHED PATENT APPLICATION

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10619690

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