Vibration isolation table
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United States of America Patent
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-
Apr 12, 2005
Grant Date -
Jun 3, 2004
app pub date -
Nov 26, 2003
filing date -
Nov 28, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A vibration isolation table includes a stationary housing having an opening on top thereof; a pressure-tight flexible member which closes the opening to form a first pressure chamber in the stationary housing; a primary movable base which is coupled to a central portion of the pressure-tight flexible member, the primary movable base having a bottomed hollow cylindrical member; an intermediate movable base having a swingable rod which is inserted into the bottomed hollow cylindrical member so that a bottom end of the swingable rod is supported thereby to allow the swingable rod to swing with respect to the bottomed hollow cylindrical member; and a vibration-free base on which an object to be isolated from vibration is mounted, a second pressure chamber being formed between the intermediate movable base and the vibration-free base, the second pressure chamber being capable of expanding and contracting vertically.
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