Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same
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United States of America Patent
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Apr 5, 2005
Grant Date -
Oct 2, 2003
app pub date -
Dec 27, 2002
filing date -
Apr 27, 2001
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Abstract
The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 .mu.m.sup.-1 at 157 nm of ultraviolet rays. ##STR1## wherein R.sup.1 to R.sup.12 are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X.sup.1 is --CR.sup.a R.sup.b --, --NR.sup.a -- or --PR.sup.a -- (R.sup.a and R.sup.b are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, --O--, --S--, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R.sup.1 to R.sup.12 and X.sup.1 is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.
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