Developer waste liquid regenerating apparatus and method
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United States of America Patent
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Apr 5, 2005
Grant Date -
May 27, 2004
app pub date -
Nov 27, 2002
filing date -
Jun 1, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A developer liquid regenerating system is provided with a storage tank storing a TAAH (such as TMAH)- and photoresist-containing developer waste liquid, first separating means with NF membrane, connected to the waste liquid storage tank through conduits, a storage tank connected to the first separating means through a conduit, and second separating means with NF membrane, connected to the storage tank through conduits. The developer liquid regenerating system is also connected to a developing apparatus through a conduit connected to the storage tank, and to a developer liquid control/supply apparatus through a conduit connected to the storage tank.
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