Pulsed operation of hall-current ion sources

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6870164
SERIAL NO

09689476

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In accordance with one specific embodiment of the present invention, a Hall-current ion source is operated in a pulsed mode where the pulse duration is short compared to the time for discharge fluctuations to develop. For a reduced loss of neutral gas, the time between pulses should be less than, or about equal to, the fill time for the ionizable gas in the discharge volume of the Hall-current ion source.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INC1 TERMINAL DRIVE PLAINVIEW NY 11803

International Classification(s)

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  • 2000 Application Filing Year
  • H01J Class
  • 1890 Applications Filed
  • 638 Patents Issued To-Date
  • 33.76 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances200020012002200320042005200620072008200920102011201220130255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldwin, David A Annandale, VA 14 212
Ciorneiu, Boris Great Falls, VA 9 122
Kaufman, Harold R LaPorte, CO 38 875

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Patent Citation Ranking

  • 10 Citation Count
  • H01J Class
  • 5.77 % this patent is cited more than
  • 20 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges61592191105412313115421001 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050100150200250300350400450500550600650

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