Ultra-miniature optical pressure sensing system
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United States of America Patent
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Mar 22, 2005
Grant Date -
Aug 28, 2003
app pub date -
Feb 21, 2003
filing date -
Feb 22, 2002
priority date (Note) -
Expired
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Abstract
The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.
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