Capacitive micro-electro-mechanical switch and method of manufacturing the same
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United States of America Patent
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Mar 15, 2005
Grant Date -
Aug 14, 2003
app pub date -
Dec 27, 2002
filing date -
Oct 2, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
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