Compact molecular-drag vacuum pump
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United States of America Patent
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Mar 15, 2005
Issued Date -
N/A
app pub date -
Sep 17, 2002
filing date -
Oct 18, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A molecular drag vacuum pump for pumping a gas from an inlet to an outlet includes a high-speed spinning disk disposed within a housing. Gas flows through passageways in the housing adjacent the disk, where it comes into contact with surfaces of the spinning disk. Conformable wipers direct the gas to successive stages adjacent the disk. The pump can be powered by an integrated motor, comprising permanent magnets in the disk and cooperating coils in the housing. The pump can include various features, such as ridges on the wipers, seal rings, and regenerative pumping pockets, to reduce leakage and prevent backflow. The housing can have a modular configuration to allow two or more pump modules to be connected and operate in series. Successive modules may be independently or commonly powered, and may counter-rotate.
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