Loading and unloading station for a device for the processing of circular flat work-pieces, especially semiconductor wafers
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Mar 15, 2005
Grant Date -
Sep 18, 2003
app pub date -
Mar 13, 2002
filing date -
Mar 13, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The device comprises a carrier for a workpiece; the carrier can be moved along a vertical and a horizontal axis by use of a drive mechanism and has an approximately planar contact surface for the workpiece, whereby the workpiece can be held on the contact surface by a contact mechanism of the carrier, especially vacuum, a retaining ring on the carrier encircling the contact surface and projecting downwards beyond the contact surface and having an inner diameter which is slightly larger than the outer diameter of the workpiece. At least three centering cams are arranged on a circle, the centering cams can be moved synchronously and in a radial direction by use of a centering drive, the centering cams having a supporting surface oriented on the top. The supporting surface has an approximately vertical stop surface as well as a stop being radially outwards of the stop surface adapted to engage the outer side of the retaining ring, when the centering cams are radially moved towards each other and the carrier is set down until coming close to our onto the centering cams. A robot is provided so that a workpiece can be loaded on cams or removed from it, the outer diameter of the retaining ring and the position of the stop surface and of the stop being dimensioned such that the workpiece is arranged approximately in a centered way relative to the vertical axis of the carrier when the stops of the centering cams engage the retaining ring.

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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
PETER WOLTERS GMBH | 24768 RENDSBURG |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Keller, Thomas | Osterronfeld, DE | 74 | 299 |
Moller, Helge | Peissen, DE | 6 | 27 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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