Loading and unloading station for a device for the processing of circular flat work-pieces, especially semiconductor wafers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6866468
APP PUB NO 20030177548A1
SERIAL NO

10098163

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The device comprises a carrier for a workpiece; the carrier can be moved along a vertical and a horizontal axis by use of a drive mechanism and has an approximately planar contact surface for the workpiece, whereby the workpiece can be held on the contact surface by a contact mechanism of the carrier, especially vacuum, a retaining ring on the carrier encircling the contact surface and projecting downwards beyond the contact surface and having an inner diameter which is slightly larger than the outer diameter of the workpiece. At least three centering cams are arranged on a circle, the centering cams can be moved synchronously and in a radial direction by use of a centering drive, the centering cams having a supporting surface oriented on the top. The supporting surface has an approximately vertical stop surface as well as a stop being radially outwards of the stop surface adapted to engage the outer side of the retaining ring, when the centering cams are radially moved towards each other and the carrier is set down until coming close to our onto the centering cams. A robot is provided so that a workpiece can be loaded on cams or removed from it, the outer diameter of the retaining ring and the position of the stop surface and of the stop being dimensioned such that the workpiece is arranged approximately in a centered way relative to the vertical axis of the carrier when the stops of the centering cams engage the retaining ring.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
PETER WOLTERS GMBH24768 RENDSBURG

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Keller, Thomas Osterronfeld, DE 74 299
Moller, Helge Peissen, DE 6 27

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