Optical-element mountings exhibiting reduced deformation of optical elements held thereby

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6859337
APP PUB NO 20030234989A1
SERIAL NO

10603732

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Optical-element mountings are disclosed for holding an optical element relative to an optical column of an optical system. The optical element can have mounting protrusions extending therefrom or lack such features. An exemplary embodiment of a mounting has a respective holding device mounted to each mounting protrusion. Each holding device has a first spring-loaded support member providing rigid support of the element in a gravity direction and flexible support in tangential, radial, and tilt directions. Each holding device also can include a second spring-loaded support member providing rigid support of the element in tangential directions and flexible support in the gravity and radial directions. Another embodiment includes multiple holding devices at respective locations relative to a mounting surface of the element. Each holding device includes a respective linking unit extending from the optical column to a respective bonding member attached to a bonding location on the mounting surface. Each bonding member has a bonding pad bonded to the respective bonding location and at least first and second spring members extending from the bonding pad in respective directions to the linking unit.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 1408601 ?1408601
NIKON TECHNOLOGIES INC3-25 FUTABA 1-CHOME SHINAGAWA-KU TOKYO 142-0043

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okuyama, Takeshi Yokohama, JP 91 1070
Oshino, Tetsuya Sagamihara, JP 14 257

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