Temperature compensation mechanism for a micromechanical ring resonator
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United States of America Patent
Stats
-
Feb 22, 2005
Grant Date -
Mar 4, 2004
app pub date -
Aug 29, 2003
filing date -
Nov 2, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
First Claim
Other Claims data not available
