Semiconductor substrate with trenches for reducing substrate resistance
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Feb 22, 2005
Issued Date -
N/A
app pub date -
Sep 20, 2002
filing date -
Sep 20, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In one embodiment of the present invention, a method for fabricating semiconductor devices comprises forming an active region about a front-side of a substrate. A plurality of trenches are then formed about a back-side of the substrate. A grid of banks separates the trenches. A conductive material is then applied to the back-side of the substrate. The trenches and the conductive material act to reduce the on-state resistance of the substrate and enhance thermal conductivity, while the grid of banks maintains the structural strength of the wafer.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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VISHAY-SILICONIX | 2201 LAURELWOOD ROAD SANTA CLARA CA 95054 |
International Classification(s)

- 2002 Application Filing Year
- H01L Class
- 14069 Applications Filed
- 7752 Patents Issued To-Date
- 55.10 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Kasem, Mohammed | Santa Clara, CA | 12 | 124 |
# of filed Patents : 12 Total Citations : 124 | |||
Korec, Jacek | San Jose, CA | 63 | 2629 |
# of filed Patents : 63 Total Citations : 2629 | |||
Xu, Robert Q | Fremont, CA | 9 | 179 |
# of filed Patents : 9 Total Citations : 179 |
Cited Art Landscape
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Patent Citation Ranking
- 6 Citation Count
- H01L Class
- 2.00 % this patent is cited more than
- 20 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Nov 10, 2015 | I | Issuance | |
Oct 21, 2015 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Aug 25, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CENOVUS FCCL LTD.;REEL/FRAME:036638/0181 Owner name: FCCL PARTNERSHIP, CANADA Effective Date: Aug 25, 2015 |
Aug 06, 2013 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PRICE, GLENN ROBERT;SUN, SUSAN WEI;WASYLYK, MICHAEL JOHN;SIGNING DATES FROM 20130702 TO 20130710;REEL/FRAME:030953/0553 Owner name: CENOVUS FCCL LTD., AS OPERATOR FOR FCCL PARTNERSHI |
Jun 27, 2013 | P | Published | |
Dec 20, 2012 | F | Filing |

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