Turbo-molecular pump
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United States of America Patent
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Feb 15, 2005
Grant Date -
Sep 18, 2003
app pub date -
Mar 12, 2003
filing date -
Mar 12, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.
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