Hydrogen-selective silica-based membrane
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United States of America Patent
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Feb 15, 2005
Grant Date -
Dec 4, 2003
app pub date -
Jun 4, 2002
filing date -
Jun 4, 2002
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Abstract
A hydrogen permselective membrane, a method of forming a permselective membrane and an apparatus comprising a permselective membrane, a porous substrate and an optional intermediate layer are described. Using chemical vapor deposition (CVD) at low reactant gas concentration, high permselectivities are achieved with minimal reduction in hydrogen permeance.
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