Three-dimensional periodical structure, its manufacturing method, and method of manufacturing film
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United States of America Patent
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Feb 8, 2005
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Feb 18, 2000
filing date -
Mar 29, 1997
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Abstract
A three-dimensional periodical structure whose period is about 1 .mu.m or smaller is provided. At least two kinds of films which have two-dimensionally substantially periodical projections are successively formed in layers substantially periodical to construct structure which is substantially three-dimensionally periodical. For instance, the films are made of materials different in refractive index. The three-dimensional periodical structure whose period is about 1 .mu.m or smaller can be obtained by a simple fabricating method. By this structure, the propagation of a wave with a specific wavelength in many solid angular directions including several axial directions parallel to the plane and the thickness direction of the layers can be cut off.
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