Method and apparatus for removing organic films
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United States of America Patent
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Feb 8, 2005
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N/A
app pub date -
Oct 14, 2003
filing date -
Oct 23, 2001
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Abstract
A method and an apparatus for removing an organic film, such as a resist film, from a substrate surface are provided wherein a treatment liquid containing dissolved ozone, and preferably formed from liquid ethylene or propylene carbonate, or both, is contacted with the substrate having the organic film, and the organic film removed, wherein the apparatus contains (A) a treatment liquid delivery device, (B) a film contact device, (C) a liquid circulation device and (D) an ozone dissolution device.
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