Turbo-molecular pump having radiation temperature apparatus
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United States of America Patent
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-
Feb 8, 2005
Grant Date -
Oct 2, 2003
app pub date -
Mar 24, 2003
filing date -
Mar 28, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a radiation thermometer for measuring a temperature of a preselected one of the components of the turbo-molecular pump disposed within a view angle range of the radiation thermometer and in accordance with heat energy radiated from the preselected component. A hood is connected to the radiation thermometer so as to not interfere with the view angle range of the radiation thermometer and is configured to block heat energy radiated from components of the turbo-molecular pump disposed outside of the view angle range of the radiation thermometer.
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