Optical switching matrix and method of fabricating such a matrix
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United States of America Patent
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Jan 25, 2005
Grant Date -
Oct 16, 2003
app pub date -
Mar 18, 2003
filing date -
Apr 11, 2002
priority date (Note) -
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Abstract
An optical switching matrix, including optical input fibers (12) and optical output fibers (14) oriented substantially perpendicular to each other, moveable mirrors (5, 13) placed at the intersections of the directions defined by the various optical fibers, each mirror (13) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, and a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors. The set of mirrors are made on a first substrate wafer (2) that is covered with a second substrate wafer (20), and the various channels (38) are formed between protruding zones (34) present under the second substrate wafers. The protruding zones include housings (33) inside which the moveable mirrors are able to move.
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