Coating apparatus for disk-shaped workpieces
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United States of America Patent
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Jan 11, 2005
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N/A
app pub date -
Jul 1, 2003
filing date -
Jun 22, 2000
priority date (Note) -
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Abstract
Coating apparatus for disk-shaped workpieces has a transport chamber with a workpiece transport configuration having two linearly driven transport rams connected to a rotational axis. The rams are within shell lines of a rotation body about the axis and are extended/retracted in the same direction as the axis. A workpiece receiver is at the ends of each ram and two operating openings communicate the transport chamber with stations of the apparatus including a coating station. Surface normals of the openings are in the direction of shell lines. A pump with pump opening communicates with the transport chamber and coating station. At least one of the rams has a closure for closing the pump opening and forming a seal therefor.
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