Ion beam apparatus, ion beam processing method and sample holder member
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United States of America Patent
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Jan 4, 2005
Grant Date -
N/A
app pub date -
Jul 29, 2003
filing date -
Jul 30, 2002
priority date (Note) -
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Abstract
An ion beam processing device has a sample holder for fixing a sample on which a section has been formed by irradiation of a specified focused ion beam from a surface side, and gas ion beam irradiation device for irradiating a gas ion beam to a region of the sample fixing using the holder member that contains the section to remove a damage layer on the section. The gas ion beam from the gas ion beam irradiation device irradiates the section from a rear surface side of the sample at a specified incident angle.
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