MEMS and MEMS components from silicon kerf

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6838047
APP PUB NO 20030044302A1
SERIAL NO

10231880

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The disclosure describes an economical and environmentally benign method for using crystalline silicon metal kerf recovered from wiresaw slurries towards the fabrication of complex MEMS and MEMS components, including MEMS packages, with improved design features.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
OURTFG CORPORATION7400 SW HARVEST CT BLDG #100 BEAVERTON OR 97005

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Billiet, Romain Louis 135A Malacca Street, Penang, MY 10400 10 88
Nguyen, Hanh Thi 135A Malacca Street, Penang, MY 10400 11 103

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation