Method for producing coated substrates
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United States of America Patent
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-
Dec 28, 2004
Grant Date -
Jan 30, 2003
app pub date -
Oct 25, 2001
filing date -
Jul 27, 2001
priority date (Note) -
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Abstract
Method for producing substrates charged with materials, including placing the substrate into an evacuated vacuum container. The substrate is exposed to a reactive gas which is adsorbed on the surface. The surface with the adsorbed reactive gas is exposed to a low-energy plasma discharge with ion energy E.sub.I0 on the surface of the substrate of 0
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