Method of forming an optical sensor device having a composite sandwich structure of alternating titanium and titanium nitride layers
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United States of America Patent
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Dec 21, 2004
Grant Date -
Oct 23, 2003
app pub date -
May 12, 2003
filing date -
Sep 11, 1999
priority date (Note) -
Expired
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Abstract
In order to make a charge couple device including an interconnect layer to contact active areas, a first layer of a first titanium nitride layer on the active areas, and then a series of alternating titanium and titanium nitride layers are deposited to form a composite sandwich structure. This structure is less prone flaking while able to withstand high temperature treatment during fabrication of backside illuminated sensors to improve quantum efficiency and reduce dark current.
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