Molecular pump for forming a vacuum
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United States of America Patent
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-
Dec 21, 2004
Grant Date -
Apr 24, 2003
app pub date -
Oct 22, 2002
filing date -
Oct 24, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A molecular pump for exhausting a chamber has a casing, a stator mounted in the casing, and a rotor mounted in the casing for undergoing rotation relative to the stator during exhaustion of the container. The rotor has a surface disposed opposite to and confronting a surface of the stator. A thread groove is formed in at least one of the opposite and confronting surfaces of the stator and the rotor. A clearance varying device varies a magnitude of a clearance between the opposite and confronting surfaces of the stator and the rotor. An exhaust controlling device controls a degree of exhaustion of the chamber by adjusting the magnitude of the clearance between the opposite and confronting surfaces of the stator and the rotor to a preselected target value during operation of the molecular pump.
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