Cleaning nozzle
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United States of America Patent
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Dec 21, 2004
Grant Date -
Aug 21, 2003
app pub date -
Dec 23, 2002
filing date -
Dec 26, 2001
priority date (Note) -
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Abstract
In an aspect, the invention features an apparatus and method for cleaning with a flow of gas. In embodiments, a gas cleaning assembly is provided that includes a nozzle outlet that directs cleaning gas, e.g., toward a work piece, and a sheath gas jacket surrounding at least a portion of the nozzle that directs a sheath gas into contact with the nozzle.
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