Time base comprising an integrated micromechanical tuning fork resonator
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United States of America Patent
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-
Dec 14, 2004
Grant Date -
N/A
app pub date -
Jun 20, 2003
filing date -
Dec 21, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.
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