Method for the removing of adsorbed molecules from a chamber
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 14, 2004
Issued Date -
N/A
app pub date -
Sep 25, 2002
filing date -
Feb 25, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of removing first molecules adsorbed on the surfaces of a chamber and/or at least one object found in the chamber is provided. Second, polar molecules that have a desorptive effect on the first molecules are introduced into the chamber. The second molecules comprise nitrogen and hydrogen, and especially NH.sub.3 molecules.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully