Rotating gripper wafer flipper
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 7, 2004
Grant Date -
N/A
app pub date -
Jun 14, 2000
filing date -
Jun 14, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus for inspecting semiconductor wafers. Specifically, an arm which is constructed to hold a wafer, is mounted on a rotational device to provide a user with the means of inspecting a wafer in any position without having to physically touch the wafer or move the wafer to another inspection station. The arm provides rotation about an axis parallel to the surface of the wafer, as well as rotation about an axis run which is perpendicular to the surface of the wafer and extends through the axial center of the wafer.
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