Methods for producing thin film magnetic devices having increased orientation ratio

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United States of America Patent

PATENT NO 6821448
APP PUB NO 20020063108A1
SERIAL NO

09745182

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of producing a thin film magnetic device comprising forming a thin film of magnetic material over a surface of a substrate having a controlled surface topography, wherein the surface of the substrate is first subject to isotropic etching so as to increase the capacity of the substrate surface to induce a high orientation ratio in a thin film of magnetic material formed over the substrate surface without a reduction in the smoothness of the substrate; and a method of modifying a thin film magnetic device comprising a thin film of a magnetic material, the method comprising the step of subjecting a surface of the thin film magnetic device having a controlled surface topology to isotropic etching so as to increase the orientation ratio of the thin film magnetic device without reducing the smoothness of the surface of the thin film magnetic device.

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Patent Owner(s)

Patent OwnerAddress
DATA STORAGE INSTITUTEDSI BUILDING 5 ENGINEERING DRIVE SINGAPORE 117608

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chong, Tow Chong Singapore, SG 15 98
Huang, Lei Singapore, SG 706 4924
Wang, Jian Ping Singapore, SG 11 115

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