End effector alignment tool for substrate handling system
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United States of America Patent
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Nov 23, 2004
Grant Date -
Apr 1, 2004
app pub date -
Sep 30, 2002
filing date -
Sep 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An end effector alignment tool for properly aligning the end effector arm with a prealigner and separately with a top plate.
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