Importance

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Abstract

A method and apparatus are disclosed for a multi-channel imaging system wherein the beams of light corresponding to each channel can be individually auto-focussed. Individual channel focussing permits image data to be recorded on a surface of variable depth, such as the patterned surfaces of semiconductor wafers and masks. A light source illuminates an array of reflective, deformable, micromachined ribbons and the ribbons reflect the light to form beams for the various channels. An auto-focus detector determines the depth profile of a recording surface and focus data for each channel is fed back to the ribbon array. The focus data for a particular channel is used to control the deformation of a corresponding ribbon and consequently, the focal length of the reflected beam. The individual beams can be modulated with image data by an external modulator or by the ribbon array itself. In this manner, the beams for each channel can be focussed at different points in space, so as to effectively record the data onto a patterned recording surface.

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First Claim