Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece
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United States of America Patent
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Nov 16, 2004
Grant Date -
Jun 12, 2003
app pub date -
Jul 17, 2001
filing date -
Oct 6, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.
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