Micromachined capacitive electrical component
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United States of America Patent
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-
Nov 2, 2004
Grant Date -
Feb 20, 2003
app pub date -
Jul 16, 2002
filing date -
Dec 22, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micromachined capacitive electrical component such as a condenser microphone with a support structure and a rigid plate with an electrically conductive plate electrode secured to the support structure at discrete locations. A diaphragm of a substantially non-conductive material is secured to the support structure along its periphery at a predetermined distance from the substantially rigid plate, whereby the substantially rigid plate and the diaphragm define an air gap. The diaphragm is movable in response to sound pressure and carries an electrically conductive diaphragm electrode. The support structure and the diaphragm electrode are electrically interconnected so as to have substantially the same electrical potential. A layer of a substantially non-conductive material is disposed between the substantially rigid plate and the support structure at least at the discrete locations. Such a transducer is suitable for use in existing scientific and industrial sound measurement equipment using high polarization voltages, eg 200 V.
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