Position control apparatus and method for table member
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United States of America Patent
Stats
-
Oct 26, 2004
Grant Date -
Mar 13, 2003
app pub date -
Jul 16, 2002
filing date -
Jul 17, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
There is provided a position control apparatus and method for a table member which is capable of controlling the positioning of the table through very small displacement thereof, to thereby prevent the position of the table from deviating even when a disturbance such as vibration is applied to the table. A table member is movable relative to the base member in a predetermined direction. A threaded shaft is rotatably mounted on a base member and elastically deformable when twisted. A motor is coupled to one end of the threaded shaft, for rotating the threaded shaft to displace the table member. A pressurizing and fixing member is arranged in the vicinity of a location where the motor is coupled to the threaded shaft, for pressurizing the threaded shaft to be fixed in position.
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