Protective coatings for radiation source components
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United States of America Patent
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Oct 26, 2004
Grant Date -
Jun 24, 2004
app pub date -
Dec 20, 2002
filing date -
Dec 20, 2002
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Expired
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Abstract
Erosion-resistive coatings are provided on critical plasma-facing surfaces of an electrical gas plasma head for an EUV source. The erosion-resistive coatings comprise diamond and diamond-like materials deposited onto the critical plasma-facing surfaces. A pure diamond coating is deposited onto the plasma exposed insulator surfaces using, for example, a chemical vapor deposition processes. The diamond coating is made conductive by selective doping with p-type material, such as, but not limited to, boron and graphite.
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