Ion beam mass separation filter, mass separation method thereof and ion source using the same
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United States of America Patent
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Oct 12, 2004
Grant Date -
Sep 11, 2003
app pub date -
Mar 4, 2003
filing date -
Mar 5, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A mass separation filter has a first magnet forming a first magnetic field in an orthogonal direction to a beam axis of an ion beam, a second magnet sequentially arranged with the first magnet along the beam axis, parallel with and facing the opposite direction of the first magnet, and forming a second magnetic field orthogonal to the beam axis; and a collimator wall formed within the first and second magnetic fields that forms a transfer channel from a first curved channel deflected from the first magnetic field to a second curved channel deflected by the second magnetic field in a direction the reverse of the first magnetic field. Incident ions pass through a channel inversely curved by the magnetic fields of the first and second magnets according to the mass separation filter, and it is possible to lead ions of a desired mass in the same direction as the beam axis.
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