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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
PLASMION CORPORATION	50 HARRISON STREET HOBOKEN NJ 07030

International Classification(s)

• C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

• 2003 Application Filing Year
• C23C Class
• 1185 Applications Filed
• 451 Patents Issued To-Date
• 38.06 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kim, Steven	Harrington Park, NJ	194	7653
# of filed Patents : 194 Total Citations : 7653
Shin, Kyung-Ho	Seoul, KR	10	117
# of filed Patents : 10 Total Citations : 117

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Patent Citation Ranking

• 0 Citation Count
• C23C Class

• 0 % this patent is cited more than
• 21 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 05, 2004	US,6800177,B2   US6800177B2	GRANTED PATENT AS SECOND PUBLICATION
January 22, 2004	US,20040011641,A1   US20040011641A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 6800177

Apparatus and method for fabricating carbon thin film

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Abstract

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An apparatus and method for fabricating a carbon thin film are disclosed in the present invention. The apparatus includes a vacuum chamber having a substrate mounted therein, a sputter target inside the vacuum chamber facing into the substrate, a cesium supplying unit inside the vacuum chamber in a shape of a shield to a circumference of the target and supplying cesium vapor onto a surface of the sputter target through a plurality of openings, and a heating wire surrounding the cesium supplying unit and maintaining the cesium supplying unit at a constant pressure.

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Description

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Claims

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Legal Events

 

• STCH2008
• FP2008
• LAPS2008
• REMI2008
• I2004
• P2004
• F2003
• AS2003
• PD2002

Date	Code	Event	Description
Nov 03, 2008	STCH	INFORMATION ON STATUS: PATENT DISCONTINUATION	free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362
Oct 05, 2008	FP	LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE	Effective Date: Oct 05, 2008
Oct 05, 2008	LAPS	LAPSE FOR FAILURE TO PAY MAINTENANCE FEES
Apr 14, 2008	REMI	MAINTENANCE FEE REMINDER MAILED
Oct 05, 2004	I	Issuance
Jan 22, 2004	P	Published
Feb 21, 2003	F	Filing
Feb 21, 2003	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SHIN, KYUNG-HO;KIM, STEVEN;REEL/FRAME:013807/0383;SIGNING DATES FROM 20020905 TO 20021118 Owner name: PLASMION CORPORATION, NEW JERSEY
Jul 19, 2002	PD	Priority Date